Microdeflectometry - a novel tool to acquire three-dimensional microtopography with nanometer height resolution

Häusler G, Richter C, Leitz KH, Knauer MC (2008)


Publication Type: Journal article

Publication year: 2008

Journal

Publisher: None

Book Volume: 33

Pages Range: 449-451

Journal Issue: 4

DOI: 10.1364/OL.33.000396

Abstract

We introduce "microdeflectometry," a novel technique for measuring the microtopography of specular surfaces. The primary data are the local slope of the surface under test. Measuring the slope instead of the height implies high information efficiency and extreme sensitivity to local shape irregularities. The lateral resolution can be better than 1 μm, whereas the resulting height resolution is in the range of 1 nm. Microdeflectometry can be supplemented by methods to expand the depth of field, with the potential to provide quantitative 3D imaging with scanning-electron-microscope-like features. © 2008 Optical Society of America.

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APA:

Häusler, G., Richter, C., Leitz, K.-H., & Knauer, M.C. (2008). Microdeflectometry - a novel tool to acquire three-dimensional microtopography with nanometer height resolution. Optics Letters, 33(4), 449-451. https://doi.org/10.1364/OL.33.000396

MLA:

Häusler, Gerd, et al. "Microdeflectometry - a novel tool to acquire three-dimensional microtopography with nanometer height resolution." Optics Letters 33.4 (2008): 449-451.

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