Increase of Efficiency for the XeCl excimer laser ablation of ceramics

Geiger M, Becker W, Rebhan T, Hutfless J, Lutz N (1996)

Publication Type: Journal article

Publication year: 1996

Journal

Applied Surface Science Elsevier

Pages Range: 309-315

Journal Issue: 96 - 98

Authors with CRIS profile

Manfred Geiger Technische Fakultät

Additional Organisation(s)

Institute of Manufacturing Technology

How to cite

APA:

Geiger, M., Becker, W., Rebhan, T., Hutfless, J., & Lutz, N. (1996). Increase of Efficiency for the XeCl excimer laser ablation of ceramics. Applied Surface Science, 96 - 98, 309-315.

MLA:

Geiger, Manfred, et al. "Increase of Efficiency for the XeCl excimer laser ablation of ceramics." Applied Surface Science 96 - 98 (1996): 309-315.

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