Magnetic shape memory microactuators
Kohl M, Gueltig M, Pinneker V, Yin R, Wendler F, Krevet B (2014)
Publication Status: Published
Publication Type: Journal article, Review article
Publication year: 2014
Journal
Publisher: MDPI AG
Book Volume: 5
Pages Range: 1135-1160
Journal Issue: 4
DOI: 10.3390/mi5041135
Open Access Link: https://doi.org/10.3390/mi5041135
Abstract
By introducing smart materials in micro systems technologies, novel smart microactuators and sensors are currently being developed, e.g., for mobile, wearable, and implantable MEMS (Micro-electro-mechanical-system) devices. Magnetic shape memory alloys (MSMAs) are a promising material system as they show multiple coupling effects as well as large, abrupt changes in their physical properties, e.g., of strain and magnetization, due to a first order phase transformation. For the development of MSMA microactuators, considerable efforts are undertaken to fabricate MSMA foils and films showing similar and just as strong effects compared to their bulk counterparts. Novel MEMS-compatible technologies are being developed to enable their micromachining and integration. This review gives an overview of material properties, engineering issues and fabrication technologies. Selected demonstrators are presented illustrating the wide application potential.
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Germany (DE)How to cite
APA:
Kohl, M., Gueltig, M., Pinneker, V., Yin, R., Wendler, F., & Krevet, B. (2014). Magnetic shape memory microactuators. Micromachines, 5(4), 1135-1160. https://dx.doi.org/10.3390/mi5041135
MLA:
Kohl, Manfred, et al. "Magnetic shape memory microactuators." Micromachines 5.4 (2014): 1135-1160.
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