Gröschl AC, Schaude J, Hausotte T (2019)
Publication Type: Journal article
Publication year: 2019
Book Volume: 86
Pages Range: 216-226
Journal Issue: 4
This article presents measurements of surfaces by performing closed-loop line scans using a nano coordinate measuring system (NMM-1) [T. Hausotte, B. Percle, and G. Jager. Meas. Sci. Technol., 2009] and a new highfrequency focal-distance-modulated confocal point sensor. While maintaining the known advantages of the confocal measurement, the sensor represents an innovative combination of a fibre-coupled confocal illumination and detection with a tuneable, acoustically driven gradientindex fluid lens (TAG-lens) [Tag Optics Inc. Datasheet, 2013] for modulation of the focus distance and a novel signal processing utilizing a lock-in amplifier. The new arrangement is able to achieve an approximately linear characteristic curve for the optimised feedback control of a coordinate measuring system (CMS) in scanning sample mode. This article emphasises the implementation and use of the sensor in a coordinate measuring system and the advantages of lateral closed-loop scans holding the distance between the sample and the objective constant compared to conventional lateral scans in axial stepwise layers. The enormous saving of time eventuates in measurements with reduced measurement errors due to less thermal drifts.
APA:
Gröschl, A.C., Schaude, J., & Hausotte, T. (2019). Evaluation und Justierung eines neuartigen, hochfrequent fokusabstandsmodulierten, fasergekoppelten, konfokalen Punktsensors für axial geregelte Oberflächenmessungen mit einem Nanokoordinatenmessgerät. Technisches Messen, 86(4), 216-226. https://doi.org/10.1515/teme-2019-0008
MLA:
Gröschl, Andreas Christian, Janik Schaude, and Tino Hausotte. "Evaluation und Justierung eines neuartigen, hochfrequent fokusabstandsmodulierten, fasergekoppelten, konfokalen Punktsensors für axial geregelte Oberflächenmessungen mit einem Nanokoordinatenmessgerät." Technisches Messen 86.4 (2019): 216-226.
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