Design, fabrication and characterization of a microactuator for nebulization of fluids

Yasenov NN, Berberich SE, Frey L, Ryssel H (2004)

Publication Status: Published

Publication Type: Conference contribution

Publication year: 2004

Pages Range: 388-391

Abstract

This article deals with basic investigations of the development and manufacturing process of a piezoelectric driven microactuator for nebulization of fluids. The concept of the fabrication of the micronebulizer will be introduced. First fundamental investigations on materials characterization and process technology for the electrodes and piezoelectric A1N layers will be presented. A1N thin films have been depositetd by reactive sputtering technique and have been characterized with dielectric and ferroelectric measurements.

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

How to cite

APA:

Yasenov, N.N., Berberich, S.E., Frey, L., & Ryssel, H. (2004). Design, fabrication and characterization of a microactuator for nebulization of fluids. (pp. 388-391).

MLA:

Yasenov, Nedyu Nedev, et al. "Design, fabrication and characterization of a microactuator for nebulization of fluids." 2004. 388-391.

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