Wafer scale characterization of interface state densities without test structures by photocurrent analysis

Rommel M, Groß M, Frey L, Bauer A, Ryssel H (2005)

Publication Status: Published

Publication Type: Conference contribution, Conference Contribution

Publication year: 2005

Pages Range: 113-122

Event location: Grenoble

URI: https://www.scopus.com/record/display.uri?eid=2-s2.0-31744443828&origin=inward

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

Involved external institutions

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE)

How to cite

APA:

Rommel, M., Groß, M., Frey, L., Bauer, A., & Ryssel, H. (2005). Wafer scale characterization of interface state densities without test structures by photocurrent analysis. In Kolbesen B. O.; Farby L.; Claeys C.; Tardif F. (Eds.), Proceedings of the 35th European Solid State Device Research Conference (pp. 113-122). Grenoble.

MLA:

Rommel, Mathias, et al. "Wafer scale characterization of interface state densities without test structures by photocurrent analysis." Proceedings of the 35th European Solid State Device Research Conference, Grenoble Ed. Kolbesen B. O.; Farby L.; Claeys C.; Tardif F., 2005. 113-122.

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