ENCOTION - A new simulation tool for energetic contamination analysis

Häublein V, Frey L, Ryssel H (2002)

Publication Status: Published

Publication Type: Conference contribution, Conference Contribution

Publication year: 2002

Publisher: Institute of Electrical and Electronics Engineers Inc.

Pages Range: 217-220

Article Number: 1257977

ISBN: 0780371550

DOI: 10.1109/IIT.2002.1257977

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

How to cite

APA:

Häublein, V., Frey, L., & Ryssel, H. (2002). ENCOTION - A new simulation tool for energetic contamination analysis. In Proceedings of the 2002 14th IEEE International Conference on Ion Implantation Technology, IIT 2002 (pp. 217-220). Institute of Electrical and Electronics Engineers Inc..

MLA:

Häublein, Volker, Lothar Frey, and Heiner Ryssel. "ENCOTION - A new simulation tool for energetic contamination analysis." Proceedings of the 2002 14th IEEE International Conference on Ion Implantation Technology, IIT 2002 Institute of Electrical and Electronics Engineers Inc., 2002. 217-220.

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