Investigation of molybdenum contamination in 11B+ and 31P+ implants

Funk K, Häublein V, Chakor H, Ameen M, Frey L, Ryssel H, Ramirez A (2000)

Publication Status: Published

Publication Type: Conference contribution, Conference Contribution

Publication year: 2000

Pages Range: 711-714

Article Number: 924252

Event location: Alpbach

ISBN: 9780780364622

DOI: 10.1109/.2000.924252

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

How to cite

APA:

Funk, K., Häublein, V., Chakor, H., Ameen, M., Frey, L., Ryssel, H., & Ramirez, A. (2000). Investigation of molybdenum contamination in 11B+ and 31P+ implants. In Proceedings of the 2000 13th International Conference on Ion Implantation Technology, IIT 2000 (pp. 711-714). Alpbach.

MLA:

Funk, K., et al. "Investigation of molybdenum contamination in 11B+ and 31P+ implants." Proceedings of the 2000 13th International Conference on Ion Implantation Technology, IIT 2000, Alpbach 2000. 711-714.

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