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Enhanced depth-resolution analysis with medium energy ion scattering (meis) for shallow junction profiling

Tajima J, Park Y, Fujita M, Takai M, Schork R, Frey L, Ryssel H (2000)

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Publication Status: Published

Publication Type: Conference contribution, Conference Contribution

Publication year: 2000

Pages Range: 604-606

Article Number: 924225

Event location: Alpbach

ISBN: 9780780364622

DOI: 10.1109/.2000.924225

Authors with CRIS profile

How to cite

APA:

Tajima, J., Park, Y., Fujita, M., Takai, M., Schork, R., Frey, L., & Ryssel, H. (2000). Enhanced depth-resolution analysis with medium energy ion scattering (meis) for shallow junction profiling. In Proceedings of the 2000 13th International Conference on Ion Implantation Technology, IIT 2000 (pp. 604-606). Alpbach.

MLA:

Tajima, J., et al. "Enhanced depth-resolution analysis with medium energy ion scattering (meis) for shallow junction profiling." Proceedings of the 2000 13th International Conference on Ion Implantation Technology, IIT 2000, Alpbach 2000. 604-606.

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