Distortion of sims profiles due to ion beam mixing

Saggio M, Montandon C, Bourenkov A, Frey L, Pichler P (1997)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 1997

Journal

Radiation Effects and Defects in Solids Taylor & Francis: STM, Behavioural Science and Public Health Titles / Taylor & Francis

Publisher: Taylor and Francis Ltd.

Book Volume: 141

Pages Range: 37-52

DOI: 10.1080/10420159708211555

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Peter Pichler Technische Fakultät

How to cite

APA:

Saggio, M., Montandon, C., Bourenkov, A., Frey, L., & Pichler, P. (1997). Distortion of sims profiles due to ion beam mixing. Radiation Effects and Defects in Solids, 141, 37-52. https://dx.doi.org/10.1080/10420159708211555

MLA:

Saggio, M., et al. "Distortion of sims profiles due to ion beam mixing." Radiation Effects and Defects in Solids 141 (1997): 37-52.

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