TU F, Späth A, Drost M, Vollnhals F, Krick Calderon S, Fink R, Marbach H (2017)
Publication Type: Journal article
Publication year: 2017
Book Volume: 35
Article Number: 031601
Journal Issue: 3
DOI: 10.1116/1.4979274
Focused soft X-ray beam induced deposition of metallic deposits from metal organic precursors is a promising novel technique for additive nanostructure fabrication. In the present work, the authors present a comparative study for deposition and in situ characterization of Co and Mn nanostructures in a scanning transmission x-ray microscope. The authors detect a significant selectivity of the deposition process with respect to the incident photon energy that arises from the enhanced x-ray absorption cross section of the precursor molecules for near-threshold excitation. This effect has been investigated for the L2,3-edges of the respective metal centers of two different precursor molecules as well as the N and O K-edges of the respective ligands. The authors find a photon-limited growth mode for deposition from cobalt tricarbonyl nitrosyl [Co(CO)3NO], while the process is precursor-limited for methylcyclopentadienyl manganese tricarbonyl [MeCpMn(CO)3] possibly due to a comparably low vapor pressure of the latter precursor.
APA:
TU, F., Späth, A., Drost, M., Vollnhals, F., Krick Calderon, S., Fink, R., & Marbach, H. (2017). Exploring the fabrication of Co and Mn nanostructures with focused soft x-ray beam induced deposition. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 35(3). https://dx.doi.org/10.1116/1.4979274
MLA:
TU, Fan, et al. "Exploring the fabrication of Co and Mn nanostructures with focused soft x-ray beam induced deposition." Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics 35.3 (2017).
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