A laboratory X-ray microscopy setup using a field emission electron source and micro-structured reflection targets
Stahlhut P, Ebensperger T, Zabler S, Hanke R (2014)
Publication Type: Journal article
Publication year: 2014
Journal
Book Volume: 324
Pages Range: 4-10
DOI: 10.1016/j.nimb.2013.12.028
Abstract
We present a computed tomography (CT) setup for materials characterization with significantly improved resolution as compared to state of the art mirco- or sub\textgreekm-CT systems. The system presented here is composed of a customized JEOL JSM7100-F scanning electron microscope with a thermal field-emission electron source allowing to focus an intense electron beam onto specially designed micro-structured reflection target thereby further reducing the size of the X-ray source spot by reducing the electron interaction zone and thus reducing image blur at high magnifications. With the proposed setup geometric magnifications up to M~=~1000 and spatial resolutions down to 100~nm can be achieved. We also demonstrate the phase contrast capabilities of the setup.
Additional Organisation(s)
Exzellenz-Cluster Engineering of Advanced Materials
Zentralinstitut für Neue Materialien und Prozesstechnik
Involved external institutions
Germany (DE)How to cite
APA:
Stahlhut, P., Ebensperger, T., Zabler, S., & Hanke, R. (2014). A laboratory X-ray microscopy setup using a field emission electron source and micro-structured reflection targets. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 324, 4-10. https://dx.doi.org/10.1016/j.nimb.2013.12.028
MLA:
Stahlhut, P., et al. "A laboratory X-ray microscopy setup using a field emission electron source and micro-structured reflection targets." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 324 (2014): 4-10.
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