Realization of a computed tomography setup to achieve resolutions below 1μm

Salamon M, Hanke R, Krueger P, Uhlmann N, Voland V (2008)

Publication Type: Journal article

Publication year: 2008

Journal

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment Elsevier

Book Volume: 591

Pages Range: 50-53

Journal Issue: 1

DOI: 10.1016/j.nima.2008.03.024

Abstract

The amelioration of present X-ray imaging systems especially in computed tomography to resolutions below 1~\textgreekmm necessitates very precise equipment details such as the manipulators, focus size and stability of the tube and the detector adjustment. In this paper, we present an experimental setup of a computed tomography system with sub-micrometer resolution. The requirements on and characteristics of the components and their influence on the measurements are discussed and exemplary results of different test objects in the field of non-destructive testing with sub-micrometer resolution are presented.

Additional Organisation(s)

Exzellenz-Cluster Engineering of Advanced Materials

Involved external institutions

Fraunhofer-Institut für Integrierte Schaltungen (IIS) DE Germany (DE) Fraunhofer-Institut für Zerstörungsfreie Prüfverfahren (IZFP) / Fraunhofer Institute for Nondestructive Testing DE Germany (DE)

How to cite

APA:

Salamon, M., Hanke, R., Krueger, P., Uhlmann, N., & Voland, V. (2008). Realization of a computed tomography setup to achieve resolutions below 1μm. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 591(1), 50-53. https://dx.doi.org/10.1016/j.nima.2008.03.024

MLA:

Salamon, M., et al. "Realization of a computed tomography setup to achieve resolutions below 1μm." Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 591.1 (2008): 50-53.

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