Interpreting Atom Probe Data from Oxide-Metal Interfaces

Mccarroll I, Scherrer B, Felfer P, Moody MP, Cairney JM (2018)

Publication Status: Published

Publication Type: Journal article

Publication year: 2018

Journal

Microscopy and Microanalysis Cambridge University Press (CUP)

Publisher: CAMBRIDGE UNIV PRESS

Book Volume: 24

Pages Range: 342-349

Journal Issue: 4

DOI: 10.1017/S1431927618012370

Abstract

Understanding oxide-metal interfaces is crucial to the advancement of materials and components for many industries, most notably for semiconductor devices and power generation. Atom probe tomography provides three-dimensional, atomic scale information about chemical composition, making it an excellent technique for interface analysis. However, difficulties arise when analyzing interfacial regions due to trajectory aberrations, such as local magnification, and reconstruction artifacts. Correlative microscopy and field simulation techniques have revealed that nonuniform evolution of the tip geometry, caused by heterogeneous field evaporation, is partly responsible for these artifacts. Here we attempt to understand these trajectory artifacts through a study of the local evaporation field conditions. With a better understanding of the local evaporation field, it may be possible to account for some of the local magnification effects during the reconstruction process, eliminating these artifacts before data analysis.

Authors with CRIS profile

Peter Felfer Professur für Atom Probe Tomography

Additional Organisation(s)

Interdisziplinäres Zentrum, Center for Nanoanalysis and Electron Microscopy (CENEM) Professur für Atom Probe Tomography Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften)

Involved external institutions

University of Sydney (USYD) AU Australia (AU) Technion - Israel Institute of Technology IL Israel (IL) University of Oxford GB United Kingdom (GB)

How to cite

APA:

Mccarroll, I., Scherrer, B., Felfer, P., Moody, M.P., & Cairney, J.M. (2018). Interpreting Atom Probe Data from Oxide-Metal Interfaces. Microscopy and Microanalysis, 24(4), 342-349. https://doi.org/10.1017/S1431927618012370

MLA:

Mccarroll, Ingrid, et al. "Interpreting Atom Probe Data from Oxide-Metal Interfaces." Microscopy and Microanalysis 24.4 (2018): 342-349.

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