Time-dependent deformation behavior of freestanding and SiNx-supported gold thin films investigated by bulge tests

Merle B, Cassel D, Göken M (2015)

Publication Status: Published

Publication Type: Journal article

Publication year: 2015

Journal

Journal of Materials Research Cambridge University Press (CUP) / Materials Research Society

Publisher: CAMBRIDGE UNIV PRESS

Book Volume: 30

Pages Range: 2161-2169

Journal Issue: 14

URI: https://opus4.kobv.de/opus4-fau/files/7997/Merle_time-dependent.pdf

DOI: 10.1557/jmr.2015.184

Abstract

A novel strain-rate jump method was developed for the plane-strain bulge test and used to investigate the time-dependent deformation behavior of gold thin films in the thickness range 100-400 nm. The experimental method is based on an abrupt variation of the pressurization rate. The evaluated strain-rate sensitivity was found to be five times higher for films in freestanding condition (m = 0.094) than for films tested on a SiNx substrate (m = 0.020). Bulge creep tests confirmed this increased time-dependence. The observation of the surface of the freestanding films after the creep tests provided evidence of apparent grain boundary sliding taking place next to intragranular plastic deformation. The out-of-plane deformation was presumably favored by the columnar microstructure of the samples, with grains extending between both free surfaces. In the case of SiNx-supported films, grain boundary sliding was prevented by the good adhesion of gold to the SiNx substrate.

Authors with CRIS profile

Benoit Merle Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften) Mathias Göken Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften)

Additional Organisation(s)

Exzellenz-Cluster Engineering of Advanced Materials Interdisziplinäres Zentrum, Center for Nanoanalysis and Electron Microscopy (CENEM) Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften)

Involved external institutions

Fachhochschule Kaiserslautern - University of Applied Sciences DE Germany (DE)

How to cite

APA:

Merle, B., Cassel, D., & Göken, M. (2015). Time-dependent deformation behavior of freestanding and SiNx-supported gold thin films investigated by bulge tests. Journal of Materials Research, 30(14), 2161-2169. https://dx.doi.org/10.1557/jmr.2015.184

MLA:

Merle, Benoit, Detlev Cassel, and Mathias Göken. "Time-dependent deformation behavior of freestanding and SiNx-supported gold thin films investigated by bulge tests." Journal of Materials Research 30.14 (2015): 2161-2169.

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