An improved method for point deflection measurements on rectangular membranes

Beitrag in einer Fachzeitschrift


Details zur Publikation

Autorinnen und Autoren: Merle B, Nicholson KS, Herbert EG, Göken M
Zeitschrift: Materials and Design
Verlag: ELSEVIER SCI LTD
Jahr der Veröffentlichung: 2016
Band: 109
Seitenbereich: 485-491
ISSN: 0264-1275


Abstract

In this work, the recent theoretical advances for evaluating point deflection experiments are reviewed and further refined. An improved experimental approach based on measuring the contact stiffness during nanoindentation is implemented and applied to the evaluation of the residual stress in SiNx and gold membranes. The accuracy of the point deflection experiments is assessed by evaluating the same set of samples with the bulge test reference technique and comparing the residual stress results. It is shown that the new experimental method greatly improves the reproducibility of the measurement and that the updated evaluation scheme leads to a more reliable residual stress value. (C) 2016 Elsevier Ltd. All rights reserved.


FAU-Autorinnen und Autoren / FAU-Herausgeberinnen und Herausgeber

Göken, Mathias Prof. Dr.
Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften)
Merle, Benoit PD Dr. habil.
Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften)


Zusätzliche Organisationseinheit(en)
Exzellenz-Cluster Engineering of Advanced Materials
Interdisziplinäres Zentrum, Center for Nanoanalysis and Electron Microscopy (CENEM)


Einrichtungen weiterer Autorinnen und Autoren

Michigan Technological University


Forschungsbereiche

A2 Nanoanalysis and Microscopy
Exzellenz-Cluster Engineering of Advanced Materials


Zitierweisen

APA:
Merle, B., Nicholson, K.S., Herbert, E.G., & Göken, M. (2016). An improved method for point deflection measurements on rectangular membranes. Materials and Design, 109, 485-491. https://dx.doi.org/10.1016/j.matdes.2016.07.054

MLA:
Merle, Benoit, et al. "An improved method for point deflection measurements on rectangular membranes." Materials and Design 109 (2016): 485-491.

BibTeX: 

Zuletzt aktualisiert 2019-28-05 um 13:37