Improvements of a high-speed focus distance modulated fibrecoupled confocal sensor for nanocoordinate measuring systems

Gröschl AC, Köhnen S, Schaude J, Hausotte T (2018)

Publication Language: English

Publication Type: Conference contribution, Conference Contribution

Publication year: 2018

Publisher: VDE Verlag GmbH

City/Town: Berlin, Offenbach

Pages Range: 98-101

Event location: NürnbergConvention Center (NCC Mitte) Messezentrum 90471 Nürnberg

ISBN: ISBN 978-3-8007-4683-5

Abstract

This article presents improvements of a new robust, precise, high-frequency focal-distance-modulated confocal point sensor for probing in coordinate measuring systems (CMS). While maintaining the known advantages of the confocal measurement principle, the sensor represents an innovative combination of a fibre-coupled confocal illumination and detection with a tuneable, acoustically driven gradient-index fluid lens (TAG lens) for modulation of the focus distance andanovelsignalprocessingutilizingalock-inamplifier. Thenewarrangementisabletoachieveanapproximatelylinear characteristiccurvefortheoptimisedfeedbackcontroloftheCMSinscanningsamplemode. Thisarticleemphasisesthe improvement of the lock-in amplification by using a custom signal processing on the basis of a field programmable gate array (FPGA).

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APA:

Gröschl, A.C., Köhnen, S., Schaude, J., & Hausotte, T. (2018). Improvements of a high-speed focus distance modulated fibrecoupled confocal sensor for nanocoordinate measuring systems. In Proceedings of the SENSOREN UND MESSSYSTEME 19. ITG/GMA-Fachtagung (pp. 98-101). NürnbergConvention Center (NCC Mitte) Messezentrum 90471 Nürnberg, DE: Berlin, Offenbach: VDE Verlag GmbH.

MLA:

Gröschl, Andreas Christian, et al. "Improvements of a high-speed focus distance modulated fibrecoupled confocal sensor for nanocoordinate measuring systems." Proceedings of the SENSOREN UND MESSSYSTEME 19. ITG/GMA-Fachtagung, NürnbergConvention Center (NCC Mitte) Messezentrum 90471 Nürnberg Berlin, Offenbach: VDE Verlag GmbH, 2018. 98-101.

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