Inverse dopant profiling for highly doped semiconductor devices

Conference contribution


Publication Details

Author(s): Burger M
Editor(s): Breitenecker F, Troch I
Publication year: 2005
ISBN: 3-901608-30-3


External institutions with authors

Westfälische Wilhelms-Universität (WWU) Münster

Last updated on 2019-17-04 at 04:23