Inverse dopant profiling for highly doped semiconductor devices

Burger M (2005)

Publication Type: Conference contribution

Publication year: 2005

Event location: Vienna

ISBN: 3-901608-30-3

Authors with CRIS profile

Martin Burger

Involved external institutions

Westfälische Wilhelms-Universität (WWU) Münster DE Germany (DE)

How to cite

APA:

Burger, M. (2005). Inverse dopant profiling for highly doped semiconductor devices. In Breitenecker F, Troch I (Eds.), Proceedings of the 5th MATHMOD. Vienna.

MLA:

Burger, Martin. "Inverse dopant profiling for highly doped semiconductor devices." Proceedings of the 5th MATHMOD, Vienna Ed. Breitenecker F, Troch I, 2005.

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