Local material removal by focused ion beam milling and etching

Lipp S, Frey L, Franz G, Demm E, Petersen S, Ryssel H (1995)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 1995

Journal

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Elsevier

Book Volume: 106

Pages Range: 630-635

DOI: 10.1016/0168-583X(95)00778-4

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

Involved external institutions

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE)

How to cite

APA:

Lipp, S., Frey, L., Franz, G., Demm, E., Petersen, S., & Ryssel, H. (1995). Local material removal by focused ion beam milling and etching. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 106, 630-635. https://dx.doi.org/10.1016/0168-583X(95)00778-4

MLA:

Lipp, S., et al. "Local material removal by focused ion beam milling and etching." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 106 (1995): 630-635.

BibTeX: Download