Deep implants for semiconductor device applications

Frey L, Bogen S, Herden M, Ryssel H (1996)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 1996

Journal

Radiation Effects and Defects in Solids Taylor & Francis: STM, Behavioural Science and Public Health Titles / Taylor & Francis

Publisher: Taylor and Francis Ltd.

Book Volume: 140

Pages Range: 87-101

Journal Issue: 1

DOI: 10.1080/10420159608212943

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

How to cite

APA:

Frey, L., Bogen, S., Herden, M., & Ryssel, H. (1996). Deep implants for semiconductor device applications. Radiation Effects and Defects in Solids, 140(1), 87-101. https://doi.org/10.1080/10420159608212943

MLA:

Frey, Lothar, et al. "Deep implants for semiconductor device applications." Radiation Effects and Defects in Solids 140.1 (1996): 87-101.

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