Effect of ion-beam mixing temperature on cobalt silicide formation

Kasko I, Dehm C, Frey L, Ryssel H (1993)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 1993

Journal

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Elsevier

Pages Range: 786-789

DOI: 10.1016/0168-583X(93)90682-V

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

How to cite

APA:

Kasko, I., Dehm, C., Frey, L., & Ryssel, H. (1993). Effect of ion-beam mixing temperature on cobalt silicide formation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 786-789. https://dx.doi.org/10.1016/0168-583X(93)90682-V

MLA:

Kasko, I., et al. "Effect of ion-beam mixing temperature on cobalt silicide formation." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (1993): 786-789.

BibTeX: Download