Laser focus positioning method with submicrometer accuracy

Beitrag in einer Fachzeitschrift
(Online-Publikation)


Details zur Publikation

Autor(en): Alexeev I, Strauß J, Gröschl AC, Cvecek K, Schmidt M
Zeitschrift: Applied Optics
Verlag: Osa Optical Society of America
Jahr der Veröffentlichung: 2013
Band: 52
Heftnummer: 3
Seitenbereich: 415-421
ISSN: 0003-6935
Sprache: Englisch


Abstract


Accurate positioning of a sample is one of the primary challenges in laser micromanufacturing. There are a number of methods that allow detection of the surface position; however, only a few of them use the beam of the processing laser as a basis for the measurement. Those methods have an advantage that any changes in the processing laser beam can be inherently accommodated. This work describes a direct, contact-free method to accurately determine workpiece position with respect to the structuring laser beam focal plane based on nonlinear harmonic generation. The method makes workpiece alignment precise and time efficient due to ease of automation and provides the repeatability and accuracy of the surface detection of less than 1 μm.



FAU-Autoren / FAU-Herausgeber

Alexeev, Ilya
Lehrstuhl für Photonische Technologien
Gröschl, Andreas Christian
Lehrstuhl für Fertigungsmesstechnik
Schmidt, Michael Prof. Dr.-Ing.
Lehrstuhl für Photonische Technologien
Strauß, Johannes
Lehrstuhl für Photonische Technologien


Zusätzliche Organisationseinheit(en)
Erlangen Graduate School in Advanced Optical Technologies


Zitierweisen

APA:
Alexeev, I., Strauß, J., Gröschl, A.C., Cvecek, K., & Schmidt, M. (2013). Laser focus positioning method with submicrometer accuracy. Applied Optics, 52(3), 415-421. https://dx.doi.org/10.1364/AO.52.000415

MLA:
Alexeev, Ilya, et al. "Laser focus positioning method with submicrometer accuracy." Applied Optics 52.3 (2013): 415-421.

BibTeX: 

Zuletzt aktualisiert 2018-18-10 um 04:10