Development of a 3D capable probing system based on electrical near-field interactions for micro- and nano-coordinate metrology

Sun Z, Hausotte T (2016)

Publication Language: English

Publication Type: Conference contribution, Conference Contribution

Publication year: 2016

Pages Range: 156-161

Event location: Nürnberg DE

ISBN: 978-3-9816876-0-6

URI: http://www.ama-science.org/proceedings/details/2330

DOI: 10.5162/sensoren2016/3.1.2

Authors with CRIS profile

Zhongyuan Sun Lehrstuhl für Fertigungsmesstechnik Tino Hausotte Lehrstuhl für Fertigungsmesstechnik

Related research project(s)

Dreidimensionale elektrische Antastung für die Mikro- und Nanokoordinatenmesstechnik - 3-D-Tunnelstromtaster (3-D-Tunnelstromtaster) Jan. 1, 2013 - March 1, 2017

How to cite

APA:

Sun, Z., & Hausotte, T. (2016). Development of a 3D capable probing system based on electrical near-field interactions for micro- and nano-coordinate metrology. In Proceedings of the 18. GMA/ITG-Fachtagung Sensoren und Messsysteme 2016 (pp. 156-161). Nürnberg, DE.

MLA:

Sun, Zhongyuan, and Tino Hausotte. "Development of a 3D capable probing system based on electrical near-field interactions for micro- and nano-coordinate metrology." Proceedings of the 18. GMA/ITG-Fachtagung Sensoren und Messsysteme 2016, Nürnberg 2016. 156-161.

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