Epitaxial upward transport of Al at the beginning of the Al-induced layer exchange process

Beitrag in einer Fachzeitschrift


Details zur Publikation

Autorinnen und Autoren: Birajdar B, Antesberger T, Stutzmann M, Spiecker E
Zeitschrift: Physica Status Solidi-Rapid Research Letters
Verlag: Wiley-VCH Verlag
Jahr der Veröffentlichung: 2011
Band: 5
Heftnummer: 5-6
Seitenbereich: 172-174
ISSN: 1862-6254


Abstract


Al-induced layer exchange (ALILE) and crystallization in a stack of amorphous Si (a-Si, 100 nm)/Al (50 nm)/quartz substrate, annealed at 450 degrees C, have been investigated at different length scales by optical microscopy as well as analytical scanning and transmission electron microscopy. Significant lateral and vertical redistribution of Al was observed, yielding Al deficient dendritic cell centers surrounded by an about 10 mu m wide Al excess zone containing epitaxial islands of "pushed-up" Al whose number density and size decreases with increasing distance from the cell boundary. This new finding is likely to be a key step forward in the understanding of the complex redistribution of Al and Si during the ALILE process. (C) 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim



FAU-Autorinnen und Autoren / FAU-Herausgeberinnen und Herausgeber

Birajdar, Balaji Dr. rer. nat.
Professur für Werkstoffwissenschaften (Elektronenmikroskopie)
Spiecker, Erdmann Prof. Dr.
Lehrstuhl für Werkstoffwissenschaften (Mikro- und Nanostrukturforschung)


Zusätzliche Organisationseinheit(en)
Exzellenz-Cluster Engineering of Advanced Materials
Interdisziplinäres Zentrum, Center for Nanoanalysis and Electron Microscopy (CENEM)


Einrichtungen weiterer Autorinnen und Autoren

Technische Universität München (TUM)


Forschungsbereiche

A2 Nanoanalysis and Microscopy
Exzellenz-Cluster Engineering of Advanced Materials


Zitierweisen

APA:
Birajdar, B., Antesberger, T., Stutzmann, M., & Spiecker, E. (2011). Epitaxial upward transport of Al at the beginning of the Al-induced layer exchange process. Physica Status Solidi-Rapid Research Letters, 5(5-6), 172-174. https://dx.doi.org/10.1002/pssr.201105110

MLA:
Birajdar, Balaji, et al. "Epitaxial upward transport of Al at the beginning of the Al-induced layer exchange process." Physica Status Solidi-Rapid Research Letters 5.5-6 (2011): 172-174.

BibTeX: 

Zuletzt aktualisiert 2019-29-05 um 08:49