Chemical vapor infiltration (CVI)-Part I: A new technique to achieve diamond composites

Beitrag in einer Fachzeitschrift
(Originalarbeit)


Details zur Publikation

Autor(en): Glaser A, Rosiwal S, Freels B, Singer R
Zeitschrift: Diamond and Related Materials
Jahr der Veröffentlichung: 2004
Band: 13
Seitenbereich: 834-838
ISSN: 0925-9635
Sprache: Englisch


Abstract


Diamond/metal or diamond/ceramics penetration structures have a high potential as, e.g. heat sinks in the microelectronic industry and for tribological applications. To learn more about the basic principles in fabricating these new composites, we infiltrated porous structures of silicon carbide with diamond by chemical vapor infiltration (CVI). As a result we get a 3D penetration structures of diamond and substrate. This requires substrates with an open pored structure. An acceptable growth rate, a high amount of sp-bondings in the coating and the complete infiltration of the substrate are important requirements on the CVI-process. These requirements should be fulfilled with an effective variation of the process parameters gas pressure, gas flow, gas composition of the feed gas and the substrate temperature. The diffusion rate of the important gas species for diamond growth (H, CH) should be high compared to their durability. With a forced convection the transport rate of the gas species should be improved. For this, we designed a new hot filament apparatus for CVI, which allows some new operating states. Furthermore, we have investigated the fabrication of diamond penetration structures by CVI using a standard microwave plasma deposition reactor (ASTeX AX 6350) and a standard industrial hot filament apparatus (CC800D). Raman spectroscopy and SEM were used to characterize the diamond films. © 2003 Elsevier B.V. All rights reserved.



FAU-Autoren / FAU-Herausgeber

Rosiwal, Stefan PD Dr.-Ing.
Lehrstuhl für Werkstoffwissenschaften (Werkstoffkunde und Technologie der Metalle)
Singer, Robert Prof. Dr.-Ing.
Lehrstuhl für Werkstoffwissenschaften (Werkstoffkunde und Technologie der Metalle)


Zitierweisen

APA:
Glaser, A., Rosiwal, S., Freels, B., & Singer, R. (2004). Chemical vapor infiltration (CVI)-Part I: A new technique to achieve diamond composites. Diamond and Related Materials, 13, 834-838. https://dx.doi.org/10.1016/j.diamond.2003.10.041

MLA:
Glaser, Arno, et al. "Chemical vapor infiltration (CVI)-Part I: A new technique to achieve diamond composites." Diamond and Related Materials 13 (2004): 834-838.

BibTeX: 

Zuletzt aktualisiert 2018-08-08 um 15:54