A reproducible method for damage-free site-specific preparation of atom probe tips from interfaces
Felfer P, Alam T, Ringer SP, Cairney JM (2012)
Publication Status: Published
Publication Type: Journal article, Original article
Publication year: 2012
Journal
Publisher: Wiley-Blackwell
Book Volume: 75
Pages Range: 484-491
Journal Issue: 4
DOI: 10.1002/jemt.21081
Abstract
Atom probe tomography (APT) is a mass spectrometry method with atomic-scale spatial resolution that can be used for the investigation of a wide range of materials. The main limiting factor with respect to the type of problems that can be addressed is the small volume investigated and the randomness of common sample preparation methods. With existing site-specific specimen preparation methods it is still challenging to rapidly and reproducibly produce large numbers of successful samples from specifically selected grain boundaries or interfaces for systematic studies. A new method utilizing both focused ion beam (FIB) and transmission electron microscopy (TEM) is presented that can be used to reproducibly produce damage-free atom probe samples with features of interest at any desired orientation with an accuracy of better than 50 nm from samples that require very little prior preparation. © 2011 Wiley-Liss, Inc.
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Australia (AU)How to cite
APA:
Felfer, P., Alam, T., Ringer, S.P., & Cairney, J.M. (2012). A reproducible method for damage-free site-specific preparation of atom probe tips from interfaces. Microscopy Research and Technique, 75(4), 484-491. https://doi.org/10.1002/jemt.21081
MLA:
Felfer, Peter, et al. "A reproducible method for damage-free site-specific preparation of atom probe tips from interfaces." Microscopy Research and Technique 75.4 (2012): 484-491.
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