Investigations on excimer-laser-treated Cu/Cr contact material
Schubert E, Rosiwal S, Bergmann HW (1991)
Publication Type: Conference contribution
Publication year: 1991
Pages Range: 299-309
Conference Proceedings Title: Proceedings of SPIE - The International Society for Optical Engineering 1503
Event location: Den Haag
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How to cite
APA:
Schubert, E., Rosiwal, S., & Bergmann, H.W. (1991). Investigations on excimer-laser-treated Cu/Cr contact material. In Proceedings of SPIE - The International Society for Optical Engineering 1503 (pp. 299-309). Den Haag, NL.
MLA:
Schubert, Emil, Stefan Rosiwal, and Hans Wilhelm Bergmann. "Investigations on excimer-laser-treated Cu/Cr contact material." Proceedings of the ECO 4, Den Haag 1991. 299-309.
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