Silicon carbide CVD for electronic device applications

Wellmann P, Pons M (2006)

Publication Language: English

Publication Status: Published

Publication Type: Journal article, Editorial

Publication year: 2006

Journal

Chemical Vapor Deposition Wiley-VCH Verlag

Publisher: Wiley-VCH Verlag

Book Volume: 12

Pages Range: 463-464

Journal Issue: 8-9

DOI: 10.1002/cvde.200690018

Authors with CRIS profile

Peter Wellmann Professur für Werkstoffwissenschaften (Werkstoffe der Elektrotechnik)

Involved external institutions

Institut National Polytechnique de Grenoble - Grenoble Institute of Technology FR France (FR)

How to cite

APA:

Wellmann, P., & Pons, M. (2006). Silicon carbide CVD for electronic device applications. Chemical Vapor Deposition, 12(8-9), 463-464. https://dx.doi.org/10.1002/cvde.200690018

MLA:

Wellmann, Peter, and Michel Pons. "Silicon carbide CVD for electronic device applications." Chemical Vapor Deposition 12.8-9 (2006): 463-464.

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