Monte Carlo simulation of the MoS2 sputtering process and the influence of the normalized momentum on residual stresses

Vierneusel B, Tremmel S, Wartzack S (2015)


Publication Language: English

Publication Type: Journal article, Original article

Publication year: 2015

Journal

Publisher: American Vacuum Society

Book Volume: 33

Pages Range: 1-6

Journal Issue: 6

DOI: 10.1116/1.4926383

Authors with CRIS profile

How to cite

APA:

Vierneusel, B., Tremmel, S., & Wartzack, S. (2015). Monte Carlo simulation of the MoS2 sputtering process and the influence of the normalized momentum on residual stresses. Journal of Vacuum Science & Technology A, 33(6), 1-6. https://dx.doi.org/10.1116/1.4926383

MLA:

Vierneusel, Bernd, Stephan Tremmel, and Sandro Wartzack. "Monte Carlo simulation of the MoS2 sputtering process and the influence of the normalized momentum on residual stresses." Journal of Vacuum Science & Technology A 33.6 (2015): 1-6.

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