Development of a 3D tunneling current probing system for micro- and nano-coordinate metrology

Sun Z, Schuler A, Hausotte T (2015)

Publication Language: English

Publication Type: Conference contribution, Conference Contribution

Publication year: 2015

Event location: Taipei TW

Abstract

With decreasing structure dimensions and rising aspect ratios of the products the demands for precision measurement of three dimensional micro- and nanogeometries over a large area have increased. Therefore many different nanometre resolving 3D capable probing sensors and corresponding 3D positioning systems to operate the sensors for 3D measurements have been developed to meet such requirements. The mechanical contact-free, electrical work piece probing based on the scanning tunneling microscopy principle offers new possibilities for 3D micro coordinate measurements as well as for nanometre resolved topography measurements in micro- and nanometrology. This paper introduces an updated version of this probing sensor system extended with a 3D movable piezo scanner to directly detect its probing direction. With the magnitude and the direction of the contact vector forwarded to the position control of the nanopositioning and nanomeasuring machine NMM-1 all of the 3D measurement commands of NMM-1 can be utilized, allowing 3D surface scans and especially 3D free-form surface scans.

Authors with CRIS profile

Zhongyuan Sun Lehrstuhl für Fertigungsmesstechnik Alexander Schuler Technische Fakultät Tino Hausotte Lehrstuhl für Fertigungsmesstechnik

Related research project(s)

Dreidimensionale elektrische Antastung für die Mikro- und Nanokoordinatenmesstechnik - 3-D-Tunnelstromtaster (3-D-Tunnelstromtaster) Jan. 1, 2013 - March 1, 2017

How to cite

APA:

Sun, Z., Schuler, A., & Hausotte, T. (2015). Development of a 3D tunneling current probing system for micro- and nano-coordinate metrology. In Proceedings of the 12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015). Taipei, TW.

MLA:

Sun, Zhongyuan, Alexander Schuler, and Tino Hausotte. "Development of a 3D tunneling current probing system for micro- and nano-coordinate metrology." Proceedings of the 12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015), Taipei 2015.

BibTeX: Download