Applicability of metals as liner materials for ammonoacidic crystal growth

Beitrag in einer Fachzeitschrift
(Originalarbeit)


Details zur Publikation

Autorinnen und Autoren: Steigerwald T, Alt N, Hertweck B, Niewa R, Schlücker E, Zhang S
Zeitschrift: Chemical Engineering & Technology
Verlag: Wiley-VCH Verlag
Jahr der Veröffentlichung: 2014
Band: 37
Heftnummer: 11
Seitenbereich: 1835-1844
ISSN: 0930-7516
eISSN: 1521-4125


Abstract


The ammonoacidic crystal growth allows industrial production of bulk semiconductor materials like gallium nitride as a widely known material for applications in photonics. A limitation of this process is strong corrosion of the growth autoclave which consequently leads to high impurity density in grown crystals, even if the autoclave is partly lined with state-of-the-art systems. Innovative metallic liner technologies are evaluated which allow a complete lining of the autoclave and peripheral parts. In this way, bridging the gap between fundamental research regarding the corrosive degeneration of possible liner materials and the implementation of novel lined autoclaves for improved growth conditions. Screening tests to find suitable materials and evaluate its potential for development of a liner technology are described.



FAU-Autorinnen und Autoren / FAU-Herausgeberinnen und Herausgeber

Alt, Nicolas
Lehrstuhl für Prozessmaschinen und Anlagentechnik
Hertweck, Benjamin
Lehrstuhl für Prozessmaschinen und Anlagentechnik
Schlücker, Eberhard Prof. Dr.-Ing.
Lehrstuhl für Prozessmaschinen und Anlagentechnik
Steigerwald, Thomas
Lehrstuhl für Prozessmaschinen und Anlagentechnik


Einrichtungen weiterer Autorinnen und Autoren

Universität Stuttgart


Zitierweisen

APA:
Steigerwald, T., Alt, N., Hertweck, B., Niewa, R., Schlücker, E., & Zhang, S. (2014). Applicability of metals as liner materials for ammonoacidic crystal growth. Chemical Engineering & Technology, 37(11), 1835-1844. https://dx.doi.org/10.1002/ceat.201400414

MLA:
Steigerwald, Thomas, et al. "Applicability of metals as liner materials for ammonoacidic crystal growth." Chemical Engineering & Technology 37.11 (2014): 1835-1844.

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Zuletzt aktualisiert 2019-26-06 um 10:08