Häusler G, Hybl O, Wiesner B (2012)
Publication Type: Journal article, Original article
Publication year: 2012
Original Authors: Wiesner B, Hybl O, Häusler G
Publisher: Osa Optical Society of America
Book Volume: 51
Pages Range: 751-757
Journal Issue: 6
DOI: 10.1364/AO.51.000751
White-light interferometry (WLI) on rough surfaces is based on interference from individual speckles. The measurement uncertainty of WLI is limited by a random shift of these individual interference patterns. The statistical error in each measurement point depends on the brightness of the corresponding speckle: a dark speckle yields a larger error than a bright speckle. In this paper, a novel method is presented to reduce the measurement uncertainty significantly: by sequentially switching the direction of the illumination, the camera sees several independent speckle patterns in sequence. From each pattern, the brightest speckles are selected to eventually calculate an accurate height map. This height map displays no outliers, and the measured surface roughness is close to the stylus measurements.
APA:
Häusler, G., Hybl, O., & Wiesner, B. (2012). Improved white-light interferometry on rough surfaces by statistically independent speckle patterns. Applied Optics, 51(6), 751-757. https://dx.doi.org/10.1364/AO.51.000751
MLA:
Häusler, Gerd, Ondrej Hybl, and Bernhard Wiesner. "Improved white-light interferometry on rough surfaces by statistically independent speckle patterns." Applied Optics 51.6 (2012): 751-757.
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