Interferometry Simultaneous Measurement of the Surfaces of Cylindrical Lenses by Grazing Incidence Interferometry

Mantel KP, Lindlein N, Schwider J (2002)


Publication Type: Journal article

Publication year: 2002

Journal

Publisher: Deutscher Ingenieur-Verlag

Book Volume: 1694

Pages Range: 29-34

Abstract

Fabrication errors of cylindrical lenses may be divided into two categories: surface deviations and errors in the position and orientation of the surfaces relative to each other. A simultaneous measurement of both error sources is possible by means of grazing incidence interferometry. Thereby, the surface deviations and the misalignment errors of each surface relative to the diffractive null elements can be acquired for up to three surfaces at the same time. The misalignment errors provide information about the relative position of the surfaces and allow the detection of various error types like wedge errors and centering errors.

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How to cite

APA:

Mantel, K.P., Lindlein, N., & Schwider, J. (2002). Interferometry Simultaneous Measurement of the Surfaces of Cylindrical Lenses by Grazing Incidence Interferometry. VDI-Berichte, 1694, 29-34.

MLA:

Mantel, Klaus Peter, Norbert Lindlein, and Johannes Schwider. "Interferometry Simultaneous Measurement of the Surfaces of Cylindrical Lenses by Grazing Incidence Interferometry." VDI-Berichte 1694 (2002): 29-34.

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