Dependence of the growth rate, quality and morphology of diamond coatings on the pressure during the CVD-process in an industrial hot-filament plant

Beitrag in einer Fachzeitschrift


Details zur Publikation

Autor(en): Schwarz S, Rosiwal S, Frank M, Breidt D, Singer R
Zeitschrift: Diamond and Related Materials
Verlag: Elsevier
Jahr der Veröffentlichung: 2002
Heftnummer: 11
Seitenbereich: 589-595
ISSN: 0925-9635
Sprache: Englisch


Abstract


The pressure dependence of the growth rate, quality and morphology of CVD-diamond films in an industrial hot-filament plant (CC800D) were investigated by SEM and Raman. Additionally, the concentration of atomic hydrogen near the filament was determined via a calorimetric measurement method. At a substrate temperature of 850 °C the smallest growth rate (0.1 μm/h) and the best quality of diamond coatings were obtained at the pressure with the highest hydrogen concentration (20 mbar). The growth rate increases strongly with decreasing pressure and achieves the maximum value of 0.7 μm/h at 3 mbar. At the same time the diamond coating quality decrease. © 2002 Elsevier Science B.V. All rights reserved.



FAU-Autoren / FAU-Herausgeber

Rosiwal, Stefan PD Dr.-Ing.
Lehrstuhl für Werkstoffwissenschaften (Werkstoffkunde und Technologie der Metalle)
Singer, Robert Prof. Dr.-Ing.
Lehrstuhl für Werkstoffwissenschaften (Werkstoffkunde und Technologie der Metalle)


Zitierweisen

APA:
Schwarz, S., Rosiwal, S., Frank, M., Breidt, D., & Singer, R. (2002). Dependence of the growth rate, quality and morphology of diamond coatings on the pressure during the CVD-process in an industrial hot-filament plant. Diamond and Related Materials, 11, 589-595. https://dx.doi.org/10.1016/S0925-9635(01)00702-6

MLA:
Schwarz, Sergej, et al. "Dependence of the growth rate, quality and morphology of diamond coatings on the pressure during the CVD-process in an industrial hot-filament plant." Diamond and Related Materials 11 (2002): 589-595.

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Zuletzt aktualisiert 2018-08-09 um 07:09