Growth of high-quality homoepitaxial diamond films by HF-CVD

Beitrag in einer Fachzeitschrift

Details zur Publikation

Autor(en): Stammler M, Eisenbeiß H, Ristein J, Neubauer J, Göbbels M, Ley L, Ristein J, Ley L
Zeitschrift: Diamond and Related Materials
Verlag: Elsevier
Jahr der Veröffentlichung: 2002
Band: 11
Heftnummer: 3-6
Seitenbereich: 504-508
ISSN: 0925-9635
Sprache: Englisch


Defined growth of high-quality crystalline diamond films is necessary for manufacturing of electronic devices. Several groups have already worked on this topic and the main challenges remaining are the suppression of crystalline defects, the reduction of impurities and higher growth rates. High-quality homoepitaxial diamond films were produced in a hot filament chemical vapor deposition (HF-CVD) system with and without addition of nitrogen to the gas phase. Substrates were (100)-oriented synthetic Ib diamonds (Sumitomo) with a maximum misorientation angle of 0.3° as determined by X-ray diffraction. By adjusting the α parameter independently to a value close to two using polycrystalline diamond films on silicon growth rates of up to 500 nm/h could be achieved while simultaneously keeping the density of unepitaxial crystallites below 10 cm-2. The surface roughness (RMS) was below 1 nm in a 1 × 1-μm2 area. Impurities were studied by photoluminescence and cathodoluminescence spectroscopy. For the films deposited without intentional nitrogen addition, nitrogen-related impurities could only be detected by low temperature photoluminescence indicating a very low concentration. At 1.68 eV we observed the signature of the Si-vacancy complex probably caused by evaporation of Si from the tungsten filament. © 2002 Elsevier Science B.V. All rights reserved.

FAU-Autoren / FAU-Herausgeber

Göbbels, Matthias Prof. Dr.
Lehrstuhl für Mineralogie
Ley, Lothar Prof. Dr.
Naturwissenschaftliche Fakultät
Neubauer, Jürgen apl. Prof. Dr.
Lehrstuhl für Mineralogie
Ristein, Jürgen apl. Prof. Dr.
Lehrstuhl für Laserphysik
Ristein, Jürgen apl. Prof. Dr.
Naturwissenschaftliche Fakultät


Stammler, M., Eisenbeiß, H., Ristein, J., Neubauer, J., Göbbels, M., Ley, L.,... Ley, L. (2002). Growth of high-quality homoepitaxial diamond films by HF-CVD. Diamond and Related Materials, 11(3-6), 504-508.

Stammler, Markus, et al. "Growth of high-quality homoepitaxial diamond films by HF-CVD." Diamond and Related Materials 11.3-6 (2002): 504-508.


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