Enhancement of the stability of Ti and Ni ohmic contacts to 4H-SiC with a stable protective coating for harsh environment applications

Daves W, Krauss A, Haeublein V, Bauer AJ, Frey L (2011)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 2011

Journal

Journal of Electronic Materials Springer Verlag (Germany) / Institute of Electrical and Electronics Engineers (IEEE)

Book Volume: 40

Pages Range: 1990-1997

Journal Issue: 9

DOI: 10.1007/s11664-011-1681-2

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente

Involved external institutions

Robert Bosch GmbH DE Germany (DE) Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE)

How to cite

APA:

Daves, W., Krauss, A., Haeublein, V., Bauer, A.J., & Frey, L. (2011). Enhancement of the stability of Ti and Ni ohmic contacts to 4H-SiC with a stable protective coating for harsh environment applications. Journal of Electronic Materials, 40(9), 1990-1997. https://dx.doi.org/10.1007/s11664-011-1681-2

MLA:

Daves, Walter, et al. "Enhancement of the stability of Ti and Ni ohmic contacts to 4H-SiC with a stable protective coating for harsh environment applications." Journal of Electronic Materials 40.9 (2011): 1990-1997.

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