Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing

Beitrag in einer Fachzeitschrift
(Review-Artikel)


Details zur Publikation

Autorinnen und Autoren: Schuler A, Hausotte T, Sun Z
Zeitschrift: Journal of Sensors and Sensor Systems
Verlag: Copernicus Publications
Jahr der Veröffentlichung: 2015
Band: 4
Heftnummer: 1
Seitenbereich: 199 - 208
ISSN: 2194-8771
eISSN: 2194-878X
Sprache: Englisch


Abstract


Measurement tasks of modern micro- and nanometrology are posing a problem for current measurement instruments with decreasing structure sizes and rising aspect ratios. There is an open requirement for nanometre-resolving 3-D capable sensors and corresponding 3-D positioning systems to operate the sensors for 3-D measurements. A 3-D probing system based on electrical interaction is presented which is operated on a nanopositioning system type SIOS NMM-1. Furthermore, we demonstrate the progress and new possibilities for 3-D measurements with the nanopositioning and nanomeasurement machine NMM-1 and also with the application of a rotary kinematic chain. In addition new 3-D measurement routines for the NMM-1, also for micro-tactile probing systems as well as current plans, are shown.



FAU-Autorinnen und Autoren / FAU-Herausgeberinnen und Herausgeber

Hausotte, Tino Prof. Dr.-Ing.
Lehrstuhl für Fertigungsmesstechnik
Schuler, Alexander Dr.-Ing.
Technische Fakultät
Sun, Zhongyuan
Lehrstuhl für Fertigungsmesstechnik


Zitierweisen

APA:
Schuler, A., Hausotte, T., & Sun, Z. (2015). Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing. Journal of Sensors and Sensor Systems, 4(1), 199 - 208. https://dx.doi.org/10.5194/jsss-4-199-2015

MLA:
Schuler, Alexander, Tino Hausotte, and Zhongyuan Sun. "Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing." Journal of Sensors and Sensor Systems 4.1 (2015): 199 - 208.

BibTeX: 

Zuletzt aktualisiert 2018-08-08 um 00:13