Schuler A, Hausotte T, Sun Z (2015)
Publication Language: English
Publication Type: Journal article, Review article
Publication year: 2015
Publisher: Copernicus Publications
Book Volume: 4
Pages Range: 199 - 208
Journal Issue: 1
Measurement tasks of modern micro- and nanometrology are posing a problem for current measurement instruments with decreasing structure sizes and rising aspect ratios. There is an open requirement for nanometre-resolving 3-D capable sensors and corresponding 3-D positioning systems to operate the sensors for 3-D measurements. A 3-D probing system based on electrical interaction is presented which is operated on a nanopositioning system type SIOS NMM-1. Furthermore, we demonstrate the progress and new possibilities for 3-D measurements with the nanopositioning and nanomeasurement machine NMM-1 and also with the application of a rotary kinematic chain. In addition new 3-D measurement routines for the NMM-1, also for micro-tactile probing systems as well as current plans, are shown.
APA:
Schuler, A., Hausotte, T., & Sun, Z. (2015). Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing. Journal of Sensors and Sensor Systems, 4(1), 199 - 208. https://dx.doi.org/10.5194/jsss-4-199-2015
MLA:
Schuler, Alexander, Tino Hausotte, and Zhongyuan Sun. "Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing." Journal of Sensors and Sensor Systems 4.1 (2015): 199 - 208.
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