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Sparse MIMO Array for Multi-Angle Reflection Ellipsometry

Cenanovic A, Schmidt LP (2012)

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Publication Type: Conference contribution

Publication year: 2012

Edited Volumes: 2012 IEEE International Conference on Wireless Information Technology and Systems, ICWITS 2012

Conference Proceedings Title: IEEE International Conference on Wireless Information Technology and Systems 2012

Event location: Maui, Hawaii, USA

DOI: 10.1109/ICWITS.2012.6417764

Abstract

The combination of the reflection ellipsometry method with a polarimetric imaging system illustrated in Fig. 1(a) offers a promising approach for robust material characterization of dielectric samples from the phase difference of the (p) and (s) -polarized complex images Rp and Rs [1, 2]. Since the phase difference arg(Rp/Rs) depends on the incidence angle α (Fig. 1(b)), a higher sensitivity and robustness in parameter estimation is achieved from measurements at different angles. © 2012 IEEE.

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How to cite

APA:

Cenanovic, A., & Schmidt, L.-P. (2012). Sparse MIMO Array for Multi-Angle Reflection Ellipsometry. In IEEE International Conference on Wireless Information Technology and Systems 2012. Maui, Hawaii, USA.

MLA:

Cenanovic, Amir, and Lorenz-Peter Schmidt. "Sparse MIMO Array for Multi-Angle Reflection Ellipsometry." Proceedings of the 2012 IEEE International Conference on Wireless Information Technology and Systems, ICWITS 2012, Maui, Hawaii, USA 2012.

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