Efficient Analysis of Three Dimensional EUV Mask Induced Imageing Artifacts Using the Waveguide Decomposition Method
Shao F, Evanschitzky P, Fühner T, Erdmann A (2009)
Publication Type: Conference contribution
Publication year: 2009
Conference Proceedings Title: BACUS
Event location: Monterey
DOI: 10.1117/12.833464
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How to cite
APA:
Shao, F., Evanschitzky, P., Fühner, T., & Erdmann, A. (2009). Efficient Analysis of Three Dimensional EUV Mask Induced Imageing Artifacts Using the Waveguide Decomposition Method. In BACUS. Monterey, US.
MLA:
Shao, F., et al. "Efficient Analysis of Three Dimensional EUV Mask Induced Imageing Artifacts Using the Waveguide Decomposition Method." Proceedings of the BACUS, Monterey 2009.
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