Paskaleva A, Bauer A, Lemberger M, Zürcher S (2004)
Publication Type: Conference contribution, Conference Contribution
Publication year: 2004
Book Volume: 95
Pages Range: 5583-5590
Journal Issue: 10
DOI: 10.1063/1.1702101
APA:
Paskaleva, A., Bauer, A., Lemberger, M., & Zürcher, S. (2004). Physical and Electrical Properties of Thin High-k HfxTiySizO Film With varying Hf to Ti Ratios. (pp. 5583-5590).
MLA:
Paskaleva, Albena, et al. "Physical and Electrical Properties of Thin High-k HfxTiySizO Film With varying Hf to Ti Ratios." 2004. 5583-5590.
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