Space-Resolved Measurement and 2D-Mapping of Material Parameters Using Multi-Angle Reflection Ellipsometry in W-Band

Cenanovic A, Schmidt LP (2013)


Publication Language: English

Publication Type: Conference contribution

Publication year: 2013

Journal

Publisher: Institute of Electrical and Electronics Engineers

Edited Volumes: IEEE MTT-S International Microwave Symposium Digest

Conference Proceedings Title: Proceedings of the International Microwave Symposium 2013

Event location: Seattle, USA

DOI: 10.1109/MWSYM.2013.6697797

Abstract

In this paper a free-space method is presented for space-resolved measurement of the relative permittivity and thickness of a single layer dielectric material in the W-band. The reflection of parallel and perpendicularly polarized waves from the material under test is measured with a polarimetric linear array. Synthetic aperture focusing of the raw data is performed, in order to obtain space-resolved reflection coefficients, from which the material parameters are determined using the spectroscopic multi-angle reflection ellipsometry technique. Results of the proposed method are presented in the frequency range of 75-95 GHz for low loss materials with a few millimeters of thickness. The relative uncertainty in determining the thickness and ε′ of Teflon is 2% and 3% respectively. The capability of the method to accomplish space resolved material characterization is demonstrated by two dimensional mapping of the relative permittivity of Teflon with a high accuracy. © 2013 IEEE.

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How to cite

APA:

Cenanovic, A., & Schmidt, L.-P. (2013). Space-Resolved Measurement and 2D-Mapping of Material Parameters Using Multi-Angle Reflection Ellipsometry in W-Band. In Proceedings of the International Microwave Symposium 2013. Seattle, USA: Institute of Electrical and Electronics Engineers.

MLA:

Cenanovic, Amir, and Lorenz-Peter Schmidt. "Space-Resolved Measurement and 2D-Mapping of Material Parameters Using Multi-Angle Reflection Ellipsometry in W-Band." Proceedings of the 2013 IEEE MTT-S International Microwave Symposium Digest, MTT 2013, Seattle, USA Institute of Electrical and Electronics Engineers, 2013.

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