Genetic Algorithms to Improve Mask and Illumination Geometries in Lithographic Imaging Systems
Fühner T, Erdmann A, Farkas R, Tollkühn B, Kókai G (2004)
Publication Language: English
Publication Type: Conference contribution, Original article
Publication year: 2004
Journal
Publisher: Springer-verlag
Edited Volumes: Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)
City/Town: Berlin Heidelberg
Book Volume: 3005
Pages Range: 208-219
Conference Proceedings Title: Applications of Evolutionary Computing - EvoWorkshops 2004: EvoBIO, EvoCOMNET, EvoHOT, EvoISAP, EvoMUSART, and EvoSTOC
Event location: Coimbra
ISBN: 3-540-21378-3
DOI: 10.1007/978-3-540-24653-4_22
Abstract
This paper proposes the use of a genetic algorithm to optimize mask and illumination geometries in optical projection lithography. A fitness function is introduced that evaluates the imaging quality of arbitrary line patterns in a specified focus range. As a second criterion the manufacturability and inspectability of the mask are taken into account. With this approach optimum imaging conditions can be identified without any additional a-priori knowledge of the lithographic process. Several examples demonstrate the successful application and further potentials of the proposed concept. © Springer-Verlag 2004.
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How to cite
APA:
Fühner, T., Erdmann, A., Farkas, R., Tollkühn, B., & Kókai, G. (2004). Genetic Algorithms to Improve Mask and Illumination Geometries in Lithographic Imaging Systems. In Günther R. Raidl, Stefano Cagnoni, Jürgen Branke, David Wolfe Corne, Rolf Drechsler, Yaochu Jin, Colin G. Johnson, Penousal Machado, Elena Marchiori, Franz Rothlauf, George D. Smith, Giovanni Squillero (Eds.), Applications of Evolutionary Computing - EvoWorkshops 2004: EvoBIO, EvoCOMNET, EvoHOT, EvoISAP, EvoMUSART, and EvoSTOC (pp. 208-219). Coimbra, PT: Berlin Heidelberg: Springer-verlag.
MLA:
Fühner, Tim, et al. "Genetic Algorithms to Improve Mask and Illumination Geometries in Lithographic Imaging Systems." Proceedings of the 1st European Workshop on Hardware Optimisation (EVOHOT2004), Coimbra Ed. Günther R. Raidl, Stefano Cagnoni, Jürgen Branke, David Wolfe Corne, Rolf Drechsler, Yaochu Jin, Colin G. Johnson, Penousal Machado, Elena Marchiori, Franz Rothlauf, George D. Smith, Giovanni Squillero, Berlin Heidelberg: Springer-verlag, 2004. 208-219.
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