Application of Silicon Micromachining Techniques for the Manufacturing of New Passive THz-Components

Biber S, Schür J, Schmidt LP (2006)

Publication Type: Conference contribution

Publication year: 2006

Conference Proceedings Title: German Microwave Conference, Karlsruhe, March

Authors with CRIS profile

Stephan Biber Lehrstuhl für Hochfrequenztechnik Jan Steffen Schür Lehrstuhl für Hochfrequenztechnik Lorenz-Peter Schmidt Lehrstuhl für Hochfrequenztechnik

How to cite

APA:

Biber, S., Schür, J., & Schmidt, L.-P. (2006). Application of Silicon Micromachining Techniques for the Manufacturing of New Passive THz-Components. In German Microwave Conference, Karlsruhe, March.

MLA:

Biber, Stephan, Jan Schür, and Lorenz-Peter Schmidt. "Application of Silicon Micromachining Techniques for the Manufacturing of New Passive THz-Components." Proceedings of the German Microwave Conference, Karlsruhe, March 2006.

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