Application of the metrological scanning probe microscope for high-precision, long-range, traceable measurements
Vorbringer-Dorozhovets N, Hausotte T, Jäger G, Manske E (2007)
Publication Status: Published
Publication Type: Conference contribution
Publication year: 2007
Journal
Publisher: International Society for Optical Engineering; 1999
Book Volume: 6616
Pages Range: 61624-61624
Conference Proceedings Title: Proceedings Volume 6616, Optical Measurement Systems for Industrial Inspection V
Event location: München
Abstract
Measurements of different calibrated step height and pitch standards were completed in order to test the repeatability and accuracy of the metrological SPM. The deviations between the calibrated and measured values were smaller than the uncertainty values determined by the Physikalisch-Technische Bundesanstalt (PTB) calibration. The extended uncertainty of the measurement results (step height or mean pitch value) was less than I nm.
Authors with CRIS profile
Involved external institutions
How to cite
APA:
Vorbringer-Dorozhovets, N., Hausotte, T., Jäger, G., & Manske, E. (2007). Application of the metrological scanning probe microscope for high-precision, long-range, traceable measurements. In Proceedings Volume 6616, Optical Measurement Systems for Industrial Inspection V (pp. 61624-61624). München, DE: International Society for Optical Engineering; 1999.
MLA:
Vorbringer-Dorozhovets, Nataliya, et al. "Application of the metrological scanning probe microscope for high-precision, long-range, traceable measurements." Proceedings of the Optical Metrology, München International Society for Optical Engineering; 1999, 2007. 61624-61624.
BibTeX: Download