Novel control scheme for a high-speed metrological scanning probe microscope

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Details zur Publikation

Autorinnen und Autoren: Vorbringer-Dorozhovets N, Hausotte T, Manske E, Shen JC, Jäger G
Zeitschrift: Measurement Science & Technology
Verlag: Institute of Physics: Hybrid Open Access
Jahr der Veröffentlichung: 2011
Band: 22
ISSN: 0957-0233


Some time ago, an interferometer-based metrological scanning probe microscope (SPM) was developed at the Institute of Process Measurement and Sensor Technology of the Ilmenau University of Technology, Germany. The specialty of this SPM is the combined deflection detection system that comprises an interferometer and a beam deflection. Due to this system it is possible to simultaneously measure the displacement, bending and torsion of the probe (cantilever). The SPM is integrated into a nanopositioning and nanomeasuring machine (NPM machine) and allows measurements with a resolution of 0.1 nm over a range of 25 mm x 25 mm x 5 mm. Excellent results were achieved for measurements of calibrated step height and lateral standards and these results are comparable to the calibration values from the Physikalisch-Technische Bundesanstalt (PTB) (Dorozhovets N et al 2007 Proc. SPIE 6616 661624-1-7). The disadvantage was a low attainable scanning speed and accordingly large expenditure of time. Control dynamics and scanning speed are limited because of the high masses of the stage and corner mirror of the machine. For the vertical axis an additional high-speed piezoelectric drive is integrated in the SPM in order to increase the measuring dynamics. The movement of the piezoelectric drive is controlled and traceable measured by the interferometer. Hence, nonlinearity and hysteresis in the actuator do not affect the measurement. The outcome of this is an improvement of the bending control of the cantilever and much higher scan speeds of up to 200 mu ms(-1).

FAU-Autorinnen und Autoren / FAU-Herausgeberinnen und Herausgeber

Hausotte, Tino Prof. Dr.-Ing.
Lehrstuhl für Fertigungsmesstechnik

Einrichtungen weiterer Autorinnen und Autoren

Technische Universität Ilmenau


Vorbringer-Dorozhovets, N., Hausotte, T., Manske, E., Shen, J.C., & Jäger, G. (2011). Novel control scheme for a high-speed metrological scanning probe microscope. Measurement Science & Technology, 22.

Vorbringer-Dorozhovets, Nataliya, et al. "Novel control scheme for a high-speed metrological scanning probe microscope." Measurement Science & Technology 22 (2011).


Zuletzt aktualisiert 2018-10-08 um 11:23