Numerical modelling of the plasma source ion implantation process in 2D

Conference contribution


Publication Details

Author(s): Stals L, Paulus M, Rauschenbach B, Rüde U
Publication year: 1998
Conference Proceedings Title: Computational Techniques and Applications: CTAC97
Pages range: 663--670


FAU Authors / FAU Editors

Rüde, Ulrich Prof. Dr.
Lehrstuhl für Informatik 10 (Systemsimulation)


How to cite

APA:
Stals, L., Paulus, M., Rauschenbach, B., & Rüde, U. (1998). Numerical modelling of the plasma source ion implantation process in 2D. In Computational Techniques and Applications: CTAC97 (pp. 663--670). Singapore.

MLA:
Stals, Linda, et al. "Numerical modelling of the plasma source ion implantation process in 2D." Proceedings of the Computational Techniques and Applications: CTAC97, Singapore 1998. 663--670.

BibTeX: 

Last updated on 2018-19-09 at 14:38