Numerical modelling of the plasma source ion implantation process in 2D

Stals L, Paulus M, Rauschenbach B, Rüde U (1998)

Publication Type: Conference contribution

Publication year: 1998

Pages Range: 663--670

Conference Proceedings Title: Computational Techniques and Applications: CTAC97

Event location: Singapore

Authors with CRIS profile

Ulrich Rüde Lehrstuhl für Informatik 10 (Systemsimulation)

How to cite

APA:

Stals, L., Paulus, M., Rauschenbach, B., & Rüde, U. (1998). Numerical modelling of the plasma source ion implantation process in 2D. In Computational Techniques and Applications: CTAC97 (pp. 663--670). Singapore.

MLA:

Stals, Linda, et al. "Numerical modelling of the plasma source ion implantation process in 2D." Proceedings of the Computational Techniques and Applications: CTAC97, Singapore 1998. 663--670.

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