Dimensional metrology in the macroscopic range with sub-nanometre resolution

Beitrag in einer Fachzeitschrift
(Originalarbeit)


Details zur Publikation

Autorinnen und Autoren: Hausotte T, Vorbringer-Dorozhovets N, Shen JC, Manske E, Jäger G
Zeitschrift: Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture
Verlag: SAGE Publications (UK and US)
Jahr der Veröffentlichung: 2013
Band: 227
Heftnummer: 5
Seitenbereich: 657-661
ISSN: 0954-4054
eISSN: 2041-2975


Abstract

Nanomeasuring machines are devices for solving various positioning and measuring problems in a range of several millimetres with sub-nanometre resolution. These devices are used for positioning, probing and measurements. The combination of this machine with a scanning force microscope leads to improved quality in the calibration of standards. The measurement accuracy and stability of the scanning force microscope are important for the achievable measurement uncertainty. Many systems are influenced by the creep, hysteresis and bending of the included piezo actuators. A scanning force microscope head with a combined deflection detection system that comprises an interferometer and a beam deflection system was developed. Due to this system, it is possible to simultaneously measure the displacement, bending and torsion of the cantilever with only one focussed beam. An additional high-speed piezoelectric actuator for the vertical motion of the cantilever was integrated and is controlled by the bending signal. The outcome of this additional control system is a much higher scan speed. The interferometer system can be used for precise measurement of the vertical cantilever motion. Hence, non-linearity and hysteresis in the actuator do not affect the measurement. The device was used for several calibration measurements on step height and lateral standards. This article deals with the set-up, function and application of a scanning force microscope head for dimensional metrology with the nanomeasuring machines.


FAU-Autorinnen und Autoren / FAU-Herausgeberinnen und Herausgeber

Hausotte, Tino Prof. Dr.-Ing.
Lehrstuhl für Fertigungsmesstechnik


Einrichtungen weiterer Autorinnen und Autoren

Technische Universität Ilmenau


Zitierweisen

APA:
Hausotte, T., Vorbringer-Dorozhovets, N., Shen, J.C., Manske, E., & Jäger, G. (2013). Dimensional metrology in the macroscopic range with sub-nanometre resolution. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 227(5), 657-661. https://dx.doi.org/10.1177/0954405413476386

MLA:
Hausotte, Tino, et al. "Dimensional metrology in the macroscopic range with sub-nanometre resolution." Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture 227.5 (2013): 657-661.

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Zuletzt aktualisiert 2019-30-07 um 14:53