Nanomeasuring and nanopositioning engineering

Jäger G, Hausotte T, Manske E, Büchner HJ, Mastylo R, Vorbringer-Dorozhovets N, Hofmann N (2010)

Publication Status: Published

Publication Type: Journal article

Publication year: 2010

Journal

Measurement Elsevier

Publisher: Elsevier

Book Volume: 43

Pages Range: 1099-1105

DOI: 10.1016/j.measurement.2010.04.008

Abstract

Single beam-, double beam- and triple beam-interferometers built in the NPM-Machine for six degrees of freedom measurements are described. (C) 2010 Elsevier Ltd. All rights reserved.

Authors with CRIS profile

Tino Hausotte Lehrstuhl für Fertigungsmesstechnik

Involved external institutions

Technische Universität Ilmenau DE Germany (DE)

How to cite

APA:

Jäger, G., Hausotte, T., Manske, E., Büchner, H.-J., Mastylo, R., Vorbringer-Dorozhovets, N., & Hofmann, N. (2010). Nanomeasuring and nanopositioning engineering. Measurement, 43, 1099-1105. https://dx.doi.org/10.1016/j.measurement.2010.04.008

MLA:

Jäger, Gerd, et al. "Nanomeasuring and nanopositioning engineering." Measurement 43 (2010): 1099-1105.

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